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Oxford Atomfab ALD

Oxford Atomfab ALD

Oxford Atomfab ALD

Category: OXFORD ALD

The Oxford Atomfab ALD is the fastest remote plasma production ALD system on the market.

  • Competitive Cost
  • Fast, easy maintenance
  • Excellent film uniformity
  • High material quality
  • Low substrate damage
  • Faster cycle times, high throughput
  • Clusterable and automated wafer handling

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