MICROTECH's LaserWriter system is designed for defining planar geometries and surface diagnostics in applications requiring resolutions up to 0.6 µm. The system transforms a laser beam into a controlled writing tool for photolithographic mask production or direct on-site processing on planar surfaces. In addition to micro-lithographic applications, its optical apparatus and substrate motion management are highly suitable for surface inspection or diagnostics. Thus, the same machine can be used first to create a model and then to examine the results. Patterns are created by accurately moving the scanning laser beam under the appropriate wavelength focused on the target (mask or substrate). The system's performance and cost have been optimized for research, development, or small to medium-scale production.

LaserWriter's application areas:

• Microelectronics
• Integrated Optics
• Diffraction Optics
• Micromechanics
• Microcryogenics
• Hybrid Circuits
• Flat Panel Displays
• Microwave Integrated Circuits (MICs)
• MultiChip Modules (MCM) Photovoltaics
• Photoelectrochemistry

Each application can be tailored and customized with a suitable LaserWriter configuration.

Pattern Generator

Having a LaserWriter system for microlithography in corporate or research centers implies:

• Reducing mask costs when developing new prototypes.
• Minimal mask fabrication times (masks are available shortly after patterning is completed).
• Eliminating possible masks and mask aligners. For single or low-volume prototypes, direct drawing on the final substrate may be suitable. This possibility is profitable even when a cleanroom suitable for mask aligner use is not available: direct writing results in less substrate processing, reducing defects caused by micro-contamination.

Is purchasing and maintaining expensive?

The core features of LaserWriter are competitive pricing and reliability. These are achieved by customizing the system for maintenance-free use over years and carefully selecting and configuring all components.

LaserWriter is designed and optimized for research and development applications as well as small to medium-scale production.

Maintenance costs for LaserWriter are also very low. The system is designed to require almost zero maintenance over several years of use. Naturally, the aging of the laser source is inevitable, but the replacement time can be easily predicted, and laser replacement typically takes only a few minutes.