The PRIMELINE series represents the fully-featured version of the CLEANSORB Dry bed waste gas disposal systems family. The system is specifically designed to manage the gas flows and associated operating conditions of safety-critical process applications, particularly for Metal Organic Chemical Vapor Deposition (MOCVD) applications.

In the more compact CLEANSORB PS models, a backup cartridge allows for the completion of production even after the capacity of the main absorber cartridge is exhausted. The larger CLEANSORB PD model includes two full-size absorber cartridges and a backup cartridge; one main cartridge can remain as the active exhaust gas absorber with full SEMI-S2 compliant safety protection, while the second cartridge can be independently purged before removal for refilling.

Your Advantages:

• Dedicated CLEANSORB® chemical absorbent media for critical MOCVD gases such as AsH3, PH3, or GeH4
• Optimized for safe thermal management of high-flow silicon and III-V epitaxial processes
• Unique safety features such as infrared temperature monitoring and inert gas cooling
• Touch screen control with automatic start-up routines (PD model)
• Available as a SEMI-S2 compliant version with redundant safety features