FABLINE is the standard model for the removal of harmful gases at the production level. It is available in three sizes and can be tailored to best meet the requirements of a pilot line. Additionally, it can be adapted to a complete production facility. With several thousand “Dry bed” absorption systems installed worldwide, FABLINE is the ideal model thanks to its proprietary CLEANSORB® granules. Its integrated safety and efficiency are compatible with a wide range of process applications:

Applications: Plasma Etching, CVD, ALD, Ion Implantation, and CIGS Photovoltaics.

Your Advantages:

• Passive operation principle, requiring no electricity, heating, fuel, or water
• Made from corrosion-resistant 316L stainless steel and high-quality, reliable components
• Automated routines for pressure retention testing and inert gas purging simplify cartridge replacement
• Includes a variety of configurations and options, including an integrated blower
• Available as a SEMI-S2 compliant version with redundant safety features